Abstract
Laser mass spectroscopy offers many advantages over conventional analytical techniques. Fast, sensitive, and selective fingerprint detection of organometallic precursors of III–V and II–VI semiconductors, with emphasis on CH3TeCH3, CH3TeTeCH3, C2H5TeC2H5, CH3SeCH3, (CH3)3Ga, (CH3)3In, AsH3, and others is achieved using short and ultrashort pulse tunable dye laser controlled time-of-flight mass spectroscopy (1–4).
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References
M. Stuke, Appl. Phys. Lett. 45, 1175 (1984)
R. Fantoni, M. Stuke, Appl. Phys. B (1985) in press
M. Stuke, R. Fantoni, in Springer Series in Optical Sciences “Laser Spectroscopy VII”, Ed. T.W. Hänsch, Y.R. Shen p 414 (1985)
M. Stuke, in “Oberflächentechnik”, SURTEC 85, VDE-Verlag Berlin, p465 (1985)
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© 1986 Springer-Verlag Berlin, Heidelberg
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Stuke, M. (1986). Laser Mass Spectroscopy - Diagnostics of Organometallic Compounds and Applications for Laser CVD. In: Waidelich, W. (eds) Laser/Optoelektronik in der Technik / Laser/Optoelectronics in Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82638-2_25
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DOI: https://doi.org/10.1007/978-3-642-82638-2_25
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-16017-5
Online ISBN: 978-3-642-82638-2
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