Abstract
The temperature of 30 nm thick Te films has been studied during annealing with a XeCl Excimer laser. Using a pyroelectric thin film calorimeter melting, boiling and recrystallization were observed. Boiling was identified as the prevalent mechanism for the loss of material.
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References
H. Coufal, Appl. Phys. Lett. 44, 59 (1984).
W. Lee and R. Geiss, J. Appl. Phys. 54, 1351 (1983).
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© 1984 Springer-Verlag Berlin Heidelberg
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Coufal, H., Lee, W. (1984). Time Resolved Calorimetry of 30 nm Te-Films During Laser Annealing. In: Bäuerle, D. (eds) Laser Processing and Diagnostics. Springer Series in Chemical Physics, vol 39. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82381-7_4
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DOI: https://doi.org/10.1007/978-3-642-82381-7_4
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-82383-1
Online ISBN: 978-3-642-82381-7
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