Time Resolved Calorimetry of 30 nm Te-Films During Laser Annealing
The temperature of 30 nm thick Te films has been studied during annealing with a XeCl Excimer laser. Using a pyroelectric thin film calorimeter melting, boiling and recrystallization were observed. Boiling was identified as the prevalent mechanism for the loss of material.
KeywordsLaser Fluences Vibrational Relaxation Laser Annealing Pyroelectric Coefficient Prevalent Mechanism
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