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SIMS Combined with Other Methods of Surface Analysis

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Secondary Ion Mass Spectrometry SIMS IV

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 36))

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Abstract

Like all methods of surface analysis, SIMS provides only fragmentary information and therefore profits by combination with complementary techniques. Comparable results can only be obtained if these additional methods are applied to the same surface simultaneously or sequentially in one UHV system.

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Author information

Authors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, Münster, D-4400, Fed. Rep. of Germany

    Otto Ganschow

Authors
  1. Otto Ganschow
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Editor information

Editors and Affiliations

  1. Phsysikalisches Inst., Universität Münster, Münster, D-4400, Fed. Rep. of Germany

    A. Benninghoven

  2. College of General Education, Osaka University, Osaka 560, Japan

    J. Okano

  3. Department of Applied Physics, Osaka University, Osaka 565, Japan

    R. Shimizu

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1984 Springer-Verlag Berlin Heidelberg

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Ganschow, O. (1984). SIMS Combined with Other Methods of Surface Analysis. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_58

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  • DOI: https://doi.org/10.1007/978-3-642-82256-8_58

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82258-2

  • Online ISBN: 978-3-642-82256-8

  • eBook Packages: Springer Book Archive

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