SIMS with Very High Spatial Resolution Using Liquid Metal Ion Sources

  • A. R. Waugh
  • A. R. Bayly
  • K. Anderson
Conference paper
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 36)


The practical lateral spatial resolution of scanned ion microprobes has been limited until recently to ≳ 1μm by the relatively low brightness and large source size of duoplasmatron ion sources [1]. During the last decade liquid metal field-ion sources (LMFIS) have been developed with much higher brightness (~106 A/ and small source size (<100nm) [2,3] : it was recognised early on that these sources were potentially very suitable for ion probes with sub-micron resolution [1, 31. SELIGER and coworkers [4] showed that probe diameters of less than 100nm at 55keV were possible using gallium ion.


Quadrupole Mass Filter High Resolution Semi Small Source Size Large Source Size 200nm Resolution 
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Copyright information

© Springer-Verlag Berlin Heidelberg 1984

Authors and Affiliations

  • A. R. Waugh
    • 1
  • A. R. Bayly
    • 1
  • K. Anderson
    • 1
  1. 1.VG Scientific Ltd., The Birches Industrial EstateSussexEngland

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