Abstract
The secondary ion mass spectrometry(SIMS) is widely used as a powerful technique for surface analysis. Although SIMS shows a very high sensitivity for many elements by using positive or negative ion emissions from the specimen(l), its spatial resolution is limited mainly by the source size of the ion gun with such a type as the duoplasmatron or the surface ionization with a porous W flat emitter. Thus, we developed a new type ion source with a small source size which can be used in two modes, either surface ionization or electrohydrodynamic(EHD).
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
H.A. Storms, J.D. Stein and K.F. Brown, Anal. Chem., 49, 2023(1977)
V.E. Krohn and G.R. Ringo, Appl. Phys. Lett., 27, 479(1975)
L.W. Swanson, G.A. Schwind and A.E. Bell, J. Appl. Phys., 51,3453(1980)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1984 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Okutani, T., Fukuda, M., Noda, T., Tamura, H., Watanabe, H. (1984). A New Type Surface Ionization Source with an Additional Mode of Electrohydrodynamic Ionization for SIMS. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_36
Download citation
DOI: https://doi.org/10.1007/978-3-642-82256-8_36
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-82258-2
Online ISBN: 978-3-642-82256-8
eBook Packages: Springer Book Archive