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Secondary Ion Mass Spectrometry SIMS IV pp 57–59Cite as

Hydrogen Ion Bombardment in Secondary Ion Mass Spectrometry

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Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 36))

Abstract

Secondary ion mass spectrometry (SIMS) has been successfully used for fundamental and applied studies of solid surfaces. Thus it is important to know regularities in the secondary ion emission (SIE) induced by the primary beams of inert or chemically active elements [1]. The SIE intensity was found to depend not only on the surface sputtering processes (the intensity rises with the atomic number of the bombarding ion) but also on the ionization efficiency of the sputtered atoms (the efficiency is strongly dependent on the physico-chemical state of target surface and experimental conditions). Analytical capabilities of SIMS might be improved by the use of light ions producing low sputtering and causing minimum surface erosion.

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References

  1. V.T.Cherepin: Ionny zond (Naukova dumka, Kiev 1981)

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  2. M.A.Vasyliev, A.D.Krasyuk, V.T.Cherepin: Sov.Pribory Techn. Exper. 3 173 (1977)

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  3. M.A.Vasyliev, A.A.Kosyachkov, I.N.Makeeva, V.T.Cherepin: Sov.Povekhnost. Fizika,Khimiya, Mekhanika, 1 103 (1982)

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Author information

Authors and Affiliations

  1. Institute of Metal Physics, Acad. Sci. UkrSSR, Kiev 142, USSR

    V. T. Cherepin, A. A. Kosyachkov & I. N. Makeeva

Authors
  1. V. T. Cherepin
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  2. A. A. Kosyachkov
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  3. I. N. Makeeva
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Editor information

Editors and Affiliations

  1. Phsysikalisches Inst., Universität Münster, Münster, D-4400, Fed. Rep. of Germany

    A. Benninghoven

  2. College of General Education, Osaka University, Osaka 560, Japan

    J. Okano

  3. Department of Applied Physics, Osaka University, Osaka 565, Japan

    R. Shimizu

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1984 Springer-Verlag Berlin Heidelberg

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Cherepin, V.T., Kosyachkov, A.A., Makeeva, I.N. (1984). Hydrogen Ion Bombardment in Secondary Ion Mass Spectrometry. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_16

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  • DOI: https://doi.org/10.1007/978-3-642-82256-8_16

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82258-2

  • Online ISBN: 978-3-642-82256-8

  • eBook Packages: Springer Book Archive

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