Surface Second Harmonic Generation from the Si/SiO2 Interface Using 10 fs Pulses
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 62)
Surface second harmonic generation from the Si(100)/SiO2 interface is measured using 10 fs pulses. The dependence of the oscillation amplitudes as a function of azimuthal angle on miscut and surface roughness is examined.
KeywordsAzimuthal Angle Harmonic Generation Oxide Thickness Bell Laboratory Interface Width
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© Springer-Verlag Berlin Heidelberg 1996