Electron Microscopy of Electron-Stimulated Processes at Oxide Surfaces

Abstract

This paper provides a brief overview of recent electron microscopy studies of electron-stimulated desorption(ESD) processes occurring at maximally valent oxide surfaces, with emphasis upon the profile imaging mode of observation. The products that accumulate on the oxide surfaces as a result of ESD depend upon characteristics of the electron beam (energy, current density), the residual vacuum level, and the specimen temperature, and include reduced oxides, metallic particles and facetted exit-surface sputter pits. The diversity of results is an indication of competing electronic, diffusional and ballistic mechanisms: determination of the dominant process must be inferred from the final state of the surface under a variety of experimental conditions.