Advertisement

Depth Resolved Diffuse Scattering from Buried CoSi2 Layers in Silicon

  • D. Bahr
  • B. Burandt
  • M. Tolan
  • W. Press
  • R. Jebasinski
  • S. Mantl
Part of the Springer Proceedings in Physics book series (SPPHY, volume 61)

Abstract

Buried single crystalline layers of CoSi2 in Si with (001) surfaces were produced by ion implantation. The CoSi2 is of pure A-type which until now cannot be produced by MBE for this surface orientation. X-ray experiments under grazing incidence conditions show that the transitions between the layers are rather extended and that only the inner parts of the layers are perfectly crystalline. The existence of large lattice distortions can be concluded from the diffuse scattering around the in-plane (220) reflection.

Keywords

Electrical Resistivity Density Profile Diffuse Scattering Surface Orientation Electron Density Profile 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. [1]
    K. Kohlhof, S. Mantl, B. Stritzker Appl. Surf. Science 38 207 (1989).ADSCrossRefGoogle Scholar
  2. [2]
    S.K. Sinha, E.B. Sirota, S. Garoff Phys. Rev. B 38 2297 (1988).ADSGoogle Scholar
  3. [3]
    L.G. Parrat Phys. Rev. 95 359 (1954).ADSCrossRefGoogle Scholar
  4. [4]
    H. Dosch Phys. Rev. B 35 2137 (1987).ADSGoogle Scholar
  5. [5]
    S. Grotehans, G. Wallner, E. Burkel, H. Metzger, J. Peisl, H. Wagner Phys. Rev. B 39, 8450 (1989).ADSGoogle Scholar
  6. [6]
    RH. Dederichs, Journal of Physics F3 471 (1973).ADSCrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • D. Bahr
    • 1
  • B. Burandt
    • 1
  • M. Tolan
    • 1
  • W. Press
    • 1
  • R. Jebasinski
    • 2
  • S. Mantl
    • 2
  1. 1.Institut für Experimentelle PhysikUniversität KielKiel 1Fed. Rep. of Germany
  2. 2.Forschungszentrum Jülich GmbH ISIJülichFed. Rep. of Germany

Personalised recommendations