Anomalous Reflectivity: A New Method for Determining Density Profiles of Thin Films

  • S. K. Sinha
  • M. K. Sanyal
  • K. G. Huang
  • A. Gibaud
  • M. Rafailovich
  • J. Sokolov
  • X. Zhao
  • W. Zhao
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 61)

Abstract

We present a method of obtaining a model-independent density profile for a thin film deposited on a substrate using reflectivity measurements carried out at energies close to, and away from, a convenient absorption edge of the substrate. We illustrate the method using simulated data from various model profiles and with a synchrotron X-ray experiment carried out on a polymer film deposited on a Germanium substrate.

Keywords

Polystyrene Germanium 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • S. K. Sinha
    • 1
  • M. K. Sanyal
    • 1
  • K. G. Huang
    • 1
  • A. Gibaud
    • 2
  • M. Rafailovich
    • 3
  • J. Sokolov
    • 3
  • X. Zhao
    • 3
  • W. Zhao
    • 3
  1. 1.Physics DepartmentBrookhaven National LaboratoryUptonUSA
  2. 2.University of MaineC.N.R.S.Le MansFrance
  3. 3.Physics DepartmentQueens CollegeUSA

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