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Microscopic Phenomena in Epitaxy

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Book cover Surface Science

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 62))

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Abstract

Selected surface phenomena controlling epitaxial growth and the structure of epitaxial thin films are briefly reviewed and discussed with emphasis on recent achievements. Some basic statements on epitaxy are presented.

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References

  1. “Molecular Beam Epitaxy 1988,” J. Cryst. Growth 95 (1989).

    Google Scholar 

  2. M. A. Hermann and H. Sitter, “Molecular beam epitaxy,” Springer Ser. Mat. Sci. (Springer, Berlin, 1989).

    Google Scholar 

  3. “Metallorganic Vapor Phase Epitaxy 1988,” J. Cryst. Growth 93 (1988).

    Google Scholar 

  4. II-VI Compounds 1989, J. Cryst. Growth 101 (1990).

    Google Scholar 

  5. “Atomic Layer Epitaxy”, ed. T. Suntola (Blackslee, 1989).

    Google Scholar 

  6. J-i Nishizawa, K. Aoki, S. Suzuki, and K. Kikuchi, J. Cryst. Growth 99 (1990), 502.

    Article  CAS  Google Scholar 

  7. J. E. Greene, T. Motooka, J.-E. Sundgren, A. Rockett, S. Gorbatkin, D. Lubben, and S. A. Barnett, J. Cryst. Growth 79 (1986), 19.

    Article  CAS  Google Scholar 

  8. Laser Diagnostics and Photochemical Processing for Semiconductor Devices, eds. R. M. Osgood, S. R. J. Bueck, H. R. Schlossberg (Oxford, Amsterdam, 1983).

    Google Scholar 

  9. 9. Crystal Growth of Electronic Materials, ed. E. Kaldis (North Holland, Amsterdam, 1985).

    Google Scholar 

  10. Surfaces and surface reactions, Ultramicroscopy 31 (1989), N1.

    Google Scholar 

  11. A.A. Chernov,Modern Crystallography III. Crystal Growth, Springer Ser. Solid St. Sci. 36 (Springer, Berlin, 1984).

    Chapter  Google Scholar 

  12. E. Bauer, Kristallogr. 110 (1958), 372.

    Article  CAS  Google Scholar 

  13. K. Yamamoto, T. Iijima, T. Kunishi, K. Fuwa, and T. Osaka, J. Crystal Growth 94 (1989), 629.

    Article  CAS  Google Scholar 

  14. H. Nakao, T. Yao, Jpn. J. Appl. Phys. 28 (1989), N3, L352–355.

    Article  Google Scholar 

  15. G. L. Kellog, T. T. Tsong, M P. Cowan, Surf. Sci. 70 (1978), 485.

    Article  Google Scholar 

  16. M. Kloma, in: Growth of Crystals Vol. 11, ed. A. A. Chernov (Consultant Bureau, New York, 1979).

    Google Scholar 

  17. S. Isomae, S. Kishino, and M. Takahashi, J. Cryst. Growth 23 (1974), 253.

    Article  CAS  Google Scholar 

  18. W. J. Bartels and W. Nijman, J. Cryst. Growth 44 (1978), 518.

    Article  CAS  Google Scholar 

  19. P. Auvray, M. Baudet, and A. Regreny, J. Cryst. Growth 95 (1989), 288.

    Article  CAS  Google Scholar 

  20. A. Leiberich and J. Levkoff, J. Cryst. Growth 100 (1990), 330.

    Article  CAS  Google Scholar 

  21. J. Hornstra and W. J. Bartels, J. Cryst. Growth 44 (1978), 513.

    Article  CAS  Google Scholar 

  22. 22. A. A. Chernoif, unpublished.

    Google Scholar 

  23. Liquid Phase Epitaxy, J. Cryst. Growth 27 (1974).

    Google Scholar 

  24. W. van Erk, H. J. G. J. van Hock-Martens, and G. Bartels, J. Cryst. Growth 48 (1980), 621.

    Article  Google Scholar 

  25. H. Dabringhaus, H. J. Meyer, J. Cryst. Growth 16 (1972), 31; J. Cryst, Growth 61 (1983), 91.

    Article  CAS  Google Scholar 

  26. Molecular Beam Epitaxy 1986, J. Cryst. Growth 81 (1987).

    Google Scholar 

  27. J. H. Neave, P. J. Dobson, B. A. Joyce, and Jing Zhang, Appl. Phys. Lett. 47 (1985), 100.

    Article  CAS  Google Scholar 

  28. J. M. van Hove and P. I. Cohen, J. Cryst. Growth 81 (1987), 13.

    Article  Google Scholar 

  29. T. Nishinaga, T. Shirata, K. Mochizuki, and K. I. Cho, J. Cryst. Growth 99 (1990), 482.

    Article  CAS  Google Scholar 

  30. T. Nishinaga and K. I. Cho, Jpn. J. Appl. Phys. 27 (1988), L12.

    Article  CAS  Google Scholar 

  31. K. Ohta, T. Kojima, and T. Nakagawa, J. Cryst. Growth 95 (1989), 71.

    Article  CAS  Google Scholar 

  32. R. J. Hamers, V. K. Kohler, and J. E. Demuth, Ultramicroscopy 31 (1989), 10.

    Article  CAS  Google Scholar 

  33. M. G. Lagally, R. Kariotis, B. S. Swartzentruber, and Y.-W. Mo, Ultramicroscopy 31 (1989), 87.

    Article  CAS  Google Scholar 

  34. S. Stoyanov, J. Cryst. Growth 94 (1989), 751.

    Article  CAS  Google Scholar 

  35. S. Stoyanov, Europhysics Lett. 11 (1990), 361.

    Article  CAS  Google Scholar 

  36. T. Suzuki, A. Gomyo, and S. Iijima, J. Cryst. Growth 99 (1990), 60.

    Article  CAS  Google Scholar 

  37. N. Otsuka, Y. E. Ihim, Y. Hirotsu, J. Klem, and H. Morkoc, J. Cryst. Growth 95 (1989), 43.

    Article  CAS  Google Scholar 

  38. A. A. Chernov and S. S. Stoyanov, Kristallografiya 22 (1977), 248.

    CAS  Google Scholar 

  39. A. A. Chernov and T. Nishinaga, in: Morphology of Crystals, ed. I. Sunagawa (Terra Science, Tokyo, 1987), p. 207.

    Google Scholar 

  40. A. A. Chernov, Contemporary Physics 30 (1989) No. 4, 251.

    Article  CAS  Google Scholar 

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© 1992 Springer-Verlag Berlin Heidelberg

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Chernov, A.A. (1992). Microscopic Phenomena in Epitaxy. In: Ponce, F.A., Cardona, M. (eds) Surface Science. Springer Proceedings in Physics, vol 62. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-76376-2_23

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  • DOI: https://doi.org/10.1007/978-3-642-76376-2_23

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-76378-6

  • Online ISBN: 978-3-642-76376-2

  • eBook Packages: Springer Book Archive

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