Abstract
IBIT is a user interface toolkit for distributed process control and manufacturing applications. It has been used to build a direct manipulation interface for a family of ion beam implanters. In the course of controlling production, a large volume of information can be collected for both online and offline analysis. In this paper we discuss extensions to the toolkit related to data collection and analysis. These extensions, which are currently under development, include a spreadsheet for event definition, icons for controlling charting, and visualization of the ion beam density. We relate these results to data analysis in manufacturing applications in general, and to facilities needed in workstations for experimentation.
All work described in this paper was done as part of the Eaton Corp., Semiconductor Euipment Division, development of the NV-20A ion beam implanter. © Copyright 1988 Eaton Corp.
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© 1991 Springer-Verlag Berlin Heidelberg
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Koegel, J., McElroy, S., Chanasyk, B. (1991). Data Analysis in a User Interface for Distributed Process Control. In: Encarnação, J.L., Grinstein, G.G. (eds) Workstations for Experiments. IFIP Series on Computer Graphics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-75903-1_15
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DOI: https://doi.org/10.1007/978-3-642-75903-1_15
Publisher Name: Springer, Berlin, Heidelberg
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