Skip to main content
View expanded cover

Diffusion at Interfaces: Microscopic Concepts pp 19–36Cite as

Reflection High Energy Electron Diffraction Studies of Diffusion and Cluster Formation During Molecular Beam Epitaxy

  • Conference paper

Part of the Springer Series in Surface Sciences book series (SSSUR,volume 12)

Abstract

Understanding the surface processes controlling molecular beam epitaxy (MBE) is crucial to the growth of high quality epitaxial structures. The fundamental mechanisms involved in the growth include adatom and impurity adsorption, surface reconstruction, surface diffusion, cluster formation, step propagation, and evaporation. Reflection high-energy electron diffraction (RHEED) is useful because it probes the surface reconstruction and the step structure during the growth process. In particular, the competing processes of cluster formation and step propagation are followed as a function of growth conditions. The growth of GaAs and Ge by MBE has been investigated in detail with RHEED. Layer-by-layer growth is observed on these surfaces over a range of conditions. In both systems, the growth mode changes from cluster formation at low substrate temperatures to step propagation at high temperatures. The underlying step morphology also affects the growth mode. By introducing an array of steps due to a misorientation from a low-index plane, step propagation is strongly enhanced. The step motion and stability is interpreted within the framework of several growth models. The models give insight into why the MBE layers can be grown so smoothly.

Keywords

  • Molecular Beam Epitaxy
  • Cluster Formation
  • Surface Reconstruction
  • Step Propagation
  • Diffract Beam

These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

This is a preview of subscription content, access via your institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • DOI: 10.1007/978-3-642-73632-2_2
  • Chapter length: 18 pages
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
eBook
USD   109.00
Price excludes VAT (USA)
  • ISBN: 978-3-642-73632-2
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Softcover Book
USD   149.00
Price excludes VAT (USA)
Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. J.R. Arthur, Jr., J. Phys. Chem. Solids (1968) 39, 4032.

    CAS  Google Scholar 

  2. C.T. Foxon and B.A. Joyce, Surface Science (1975) 50, 434.

    CrossRef  CAS  Google Scholar 

  3. W.K. Burton, N. Cabrera, and F.C. Frank, Phil. Trans. Roy. Soc. (1951) 243, 299.

    CrossRef  Google Scholar 

  4. L.J. Giling and W.J.P Enckevort, Surface Science (1985) 161, 567.

    CrossRef  CAS  Google Scholar 

  5. J. Van Vechten, J. Crystal Growth (1977) 38, 139.

    CrossRef  Google Scholar 

  6. A. Rockett, Eighth MBE Conference, Los Angeles, 1987.

    Google Scholar 

  7. J.M. Van Hove, P.I. Cohen, and C.S. Lent, J. Vac. Sci. Technol. (1983) A1, 546.

    Google Scholar 

  8. A. Madhukar, Surface Science (1983) 132, 344.

    CrossRef  CAS  Google Scholar 

  9. K. Voigtlaender, H. Risken, and E. Kasper, Appl. Phys. (1986) A39, 31.

    CAS  Google Scholar 

  10. V. Fuenzilada and I. Einsele, J. Crystal Growth (1986) 74, 596.

    Google Scholar 

  11. R. Ghez, S.S. Iyer, and S.L. Delage, J. Vac. Sci. Technol. (1987) B5, 740.

    Google Scholar 

  12. G.S. Petrich, G.J. Whaley, P.R. Pukite, and P.I. Cohen, unpublished.

    Google Scholar 

  13. F. Reif, Fundamentals of Statistical and Thermal Physics, (McGraw-Hill, NY, 1965).

    Google Scholar 

  14. D. Walton, J. Chem. Phys. (1962) 37, 2182.

    CrossRef  CAS  Google Scholar 

  15. G. Gilmer and P. Bennema, Crystal Growth, P. Hartman, ed., (North-Holland, Amsterdam, 1973); P.I.Cohen, unpublished.

    Google Scholar 

  16. P.R. Pukite, PhD Thesis, University of Minnesota, unpublished.

    Google Scholar 

  17. P.R. Pukite, J.M. Van Hove, and P.I. Cohen, Appl. Phys. Lett. (1984) 44, 456.

    CrossRef  CAS  Google Scholar 

  18. P.R. Pukite, C.S. Lent, and P.I. Cohen, Surface Science (1985) 161, 39.

    CrossRef  CAS  Google Scholar 

  19. P.R. Pukite, J.M. Van Hove, and P.I. Cohen, J. Vac. Sci. Technol. (1984) B2, 243.

    Google Scholar 

  20. C.S. Lent and P.I. Cohen, Surface Science (1984) 139, 121;

    CrossRef  CAS  Google Scholar 

  21. C.S. Lent and P.I. Cohen, Phys. Rev. (1986) B33, 8329.

    Google Scholar 

  22. J.H. Neave, B.A. Joyce, P.J. Dobson, and N. Norton, Appl. Phys. (1983) A31, 1.

    CAS  Google Scholar 

  23. J.M. Van Hove, C.S. Lent, P.R. Pukite, and P.I. Cohen, J. Vac. Sci. Technol. (1983) B1, 741.

    Google Scholar 

  24. B.F. Lewis, F.J. Grunthaner, A. Madhukar, T.C. Lee, and R. Fernandez, J. Vac. Sci. Technol. (1985) B3, 1317.

    Google Scholar 

  25. E. Bauer, RHEED and Reflection Electron Imaging of Surfaces, ed. by P.K. Larsen, (Plenum Press, NY, in press).

    Google Scholar 

  26. S.T. Purcell, B. Heinrich, and A.S. Arrott, Phys. Rev. (1987) B35, 6458.

    Google Scholar 

  27. P.I. Cohen, P.R. Pukite, J.M. Van Hove, and C.S. Lent, J. Vac. Sci. Technol. (1986) A4, 1251.

    Google Scholar 

  28. J.M. Van Hove, P.R. Pukite, and P.I. Cohen, J. Vac. Sci. Technol. (1985) B3, 563.

    Google Scholar 

  29. J.M. Van Hove and P.I. Cohen, J. Crystal Growth, (1987) 50.

    Google Scholar 

  30. J.M. Van Hove and P.I. Cohen, Appl. Phys. Lett. (1986) 47, 726.

    CrossRef  Google Scholar 

  31. J.H. Neave, P.J. Dobson, B.A. Joyce, and J. Zhang, Appl. Phys. Lett. (1985) 47, 100.

    CrossRef  CAS  Google Scholar 

  32. J.A. Martin, D.E. Savage, W. Moritz, and M.G. Lagally, Phys. Rev. Lett. (1986) 56, 1936.

    CrossRef  CAS  Google Scholar 

  33. P.R. Pukite and P.I. Cohen, J. Cryst. Growth (1987) 50, 1739.

    CAS  Google Scholar 

  34. J. Aarts, W.M. Gerits, and P.K. Larsen, Appl. Phys. Lett. (1986) 48, 931.

    CrossRef  CAS  Google Scholar 

  35. P.R. Pukite, S. Batra, and P.I. Cohen, RHEED and Reflection Electron Imaging of Surfaces, ed. by P.K. Larsen, (Plenum Press, NY, in press).

    Google Scholar 

  36. T. Sakamoto, N.J. Kawai, T. Nakagawa, K. Ohta, and T. Kojima, Appl. Phys. Lett. (1985) 47, 617.

    CrossRef  CAS  Google Scholar 

  37. H.J. Leamy and G.H. Gilmer, J. Crystal Growth (1979) 24/25, 499.

    Google Scholar 

  38. R. Gomer, in Surface Mobilities on Solid Marerials, ed. by V. T. Bien, (Plenum Press, NY, 1983) p.15

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Electrical Engineering, University of Electrical Engineering, University of Minnesota, Minneapolis, 55455, MN, USA

    P. R. Pukite, G. S. Petrich, G. J. Whaley & P. I. Cohen

Authors
  1. P. R. Pukite
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. S. Petrich
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. G. J. Whaley
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. P. I. Cohen
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Laboratory for Surface Science & Technology, Department of Physics, University of Maine at Orono, 04469, Orono, ME, USA

    Professor Dr. Michael Grunze & Dr. Jeffrey J. Weimer & 

  2. Department of Physics, Dalhousie University, B3H3J5, Halifax, Nova Scotia, Canada

    Professor Dr. Hans Jürgen Kreuzer

Rights and permissions

Reprints and Permissions

Copyright information

© 1988 Springer-Verlag Berlin Heidelberg

About this paper

Cite this paper

Pukite, P.R., Petrich, G.S., Whaley, G.J., Cohen, P.I. (1988). Reflection High Energy Electron Diffraction Studies of Diffusion and Cluster Formation During Molecular Beam Epitaxy. In: Grunze, M., Weimer, J.J., Kreuzer, H.J. (eds) Diffusion at Interfaces: Microscopic Concepts. Springer Series in Surface Sciences, vol 12. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-73632-2_2

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-73632-2_2

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-73634-6

  • Online ISBN: 978-3-642-73632-2

  • eBook Packages: Springer Book Archive