Abstract
TFA (Thin Film on ASIC) image sensors consist of an amorphous silicon based optical detector on top of an ASIC which performs signal readout and signal processing. In this paper recent results on TFA prototypes are presented. The detector multilayer was deposited by PECVD (Plasma Enhanced Chemical Vapor Deposition) in a cluster deposition system, whereas for the ASIC a standard 0.7 μm CMOS process was employed. Focus is put on two locally adaptive sensor arrays that allow the control of sensitivity for each pixel individually. These types of sensors are ideally suited for automotive vision systems, since they do not exhibit certain disadvantages inherent to devices using logarithmic data compression or global sensitivity control and image fusion. Moreover, the reduced chip size of vertically integrated TFA devices leads to a significant reduction of manufacturing costs in comparison to CMOS imagers. In addition to the locally adaptive arrays simpler devices with global sensitivity control and a concept for color recognition in TFA devices are discussed.
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© 1998 Springer-Verlag Berlin Heidelberg
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Böhm, M. et al. (1998). High Dynamic Range Image Sensors in Thin Film on ASIC Technology for Automotive Applications. In: Ricken, D.E., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 98. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72146-5_15
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DOI: https://doi.org/10.1007/978-3-642-72146-5_15
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