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CVD Diamond for Surface Acoustic Wave Filters

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Low-Pressure Synthetic Diamond

Part of the book series: Springer Series in Materials Processing ((SSMATERIALSPROC))

Abstract

Amongst the varieties of applications of CVD diamond, the Surface Acoustic Wave (SAW) device, using its high SAW velocity, is supposed to be one of the practical applications, because polycrystalline film can be utilized. This is also followed by some other advantages: impurity control is not required; and thicknesses of only several microns are sufficient because the energy concentration is on the surface, which enables low-cost manufacturing.

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Author information

Authors and Affiliations

  1. Itami Research Laboratories, Sumitomo Electric Industries Ltd, 1-1-1 Koya-kita, Itami 664, Japan

    Shin-ichi Shikata

Authors
  1. Shin-ichi Shikata
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Editor information

Editors and Affiliations

  1. Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, D-79108, Freiburg, Germany

    Bernhard Dischler  & Christoph Wild  & 

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© 1998 Springer-Verlag Berlin Heidelberg

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Shikata, Si. (1998). CVD Diamond for Surface Acoustic Wave Filters. In: Dischler, B., Wild, C. (eds) Low-Pressure Synthetic Diamond. Springer Series in Materials Processing. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71992-9_14

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  • DOI: https://doi.org/10.1007/978-3-642-71992-9_14

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-71994-3

  • Online ISBN: 978-3-642-71992-9

  • eBook Packages: Springer Book Archive

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