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A New Research Implanter at the University of Surrey

  • P. L. F. Hemment
  • J. E. Mynard
  • E. Pásztor
  • C. J. Richmond
  • K. G. Stephens
Conference paper
Part of the Springer Series in Electrophysics book series (SSEP, volume 11)

Abstract

A new 400 keV Research Implanter at the University of Surrey is described. The beam is extracted from a Freeman type source at 40 kV, analysed by a Lintott Separator magnet with adjustable pole pieces which match the beam to the ion optics of a cylindrical electrostatic lens/accelerator system. Electrostatic elements further transport the beam and incorporate two neutral particle traps and electrostatic beam scanning over a maximum area of 100mm x 100mm. Beam diagnostics include calorimeters for current and power density determinations and facilities for IR wafer temperature and beam purity measurements during implantation. Samples are loaded through an air lock using a UHV compatible transporter which includes provisions for sample cooling or heating.

Keywords

Beam Line Dose Uniformity Target Chamber Sample Cool Beam Diagnostics 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    P.L.F. Hemment, E. Maydell-Ondrusz and K.G. Stephens: - this conference.Google Scholar
  2. 2.
    P.J. Cracknell, M. Gettings and K.G. Stephens: Nucl. Instr and Methods, 92, 465, 1971.ADSCrossRefGoogle Scholar
  3. 3.
    A. Lurio and J.E. Ziegler: Appl. Phys. Letts., 31, 482, 1977.ADSCrossRefGoogle Scholar
  4. 4.
    P.L.F. Hemment: Low Energy Ion Beams I, Inst, of Phys. Conf. Ser. 38, 117, 1977.Google Scholar
  5. 5.
    E. Pasztor, L. Kiralyhidi and P. Riedl: Report of the Central Res. Inst, for Physics, Budapest. KFKI-1977-96.Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1983

Authors and Affiliations

  • P. L. F. Hemment
    • 1
  • J. E. Mynard
    • 1
  • E. Pásztor
    • 1
    • 2
  • C. J. Richmond
    • 1
  • K. G. Stephens
    • 1
  1. 1.Department of Electronic and Electrical EngineeringUniversity of SurreyGuildford, SurreyEngland
  2. 2.Central Research Institute for PhysicsBudapestHungary

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