A New Research Implanter at the University of Surrey
A new 400 keV Research Implanter at the University of Surrey is described. The beam is extracted from a Freeman type source at 40 kV, analysed by a Lintott Separator magnet with adjustable pole pieces which match the beam to the ion optics of a cylindrical electrostatic lens/accelerator system. Electrostatic elements further transport the beam and incorporate two neutral particle traps and electrostatic beam scanning over a maximum area of 100mm x 100mm. Beam diagnostics include calorimeters for current and power density determinations and facilities for IR wafer temperature and beam purity measurements during implantation. Samples are loaded through an air lock using a UHV compatible transporter which includes provisions for sample cooling or heating.
KeywordsBeam Line Dose Uniformity Target Chamber Sample Cool Beam Diagnostics
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