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A New Facility for Ion Beam Surface Analysis

  • P. L. F. Hemment
  • J. E. Mynard
  • E. A. Maydell-Ondrusz
  • K. G. Stephens
Conference paper
Part of the Springer Series in Electrophysics book series (SSEP, volume 11)

Abstract

The surface analysis facility on the 2 MeV Van de Graaff accelerator at the University of Surrey is described. Two beam lines, including a microbeam capability, are dedicated to this application and the target chambers house 2- and 3-axis goniometers and linear drives for rapid sample changing. Rutherford backscattering and PIXE techniques may be combined with ion channelling for the analysis of semiconductor, metal, insulator and biological samples. Data is processed and stored on a DEC LSI 11-03 computer, which is linked to main frame computers with software for data interpretation.

Keywords

Beam Line Rutherford Backscatter Target Chamber Implantation Damage Backscatter Spectrum 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    P.J. Cracknell, M. Gettings and K.G. Stephens: Nucl. Instr. Meths. 92, 465, 1971.ADSCrossRefGoogle Scholar
  2. 2.
    J.F. Ziegler: New Uses of Ion Accelerators, Plenum Press, New York, 1975.Google Scholar
  3. 3.
    J.W. Mayer, E. Rimini: Ion Beam Handbook for Material Analysis, Acad. Press, London, 1977.Google Scholar
  4. 4.
    Edwards High Vacuum, Manor Royal, Crawley, Sussex, England.Google Scholar
  5. 5.
    Panmure Instruments Ltd., Bone Lane Industrial Estate, Newbury, Berks, England.Google Scholar
  6. 6.
    J.A. Cookson, A.T.G. Ferguson and F.D. Pilling: J. Radioanal. Chem. 12, 39, 1972.CrossRefGoogle Scholar
  7. 7.
    P.L.F. Hemment, J.F. Singleton and K.G. Stephens: Thin Solid Films, 1975.Google Scholar
  8. 8.
    P. Blood, L.C. Feldman, G.L. Miller, J.P. Remeika: Nucl. Inst. Meths. 149, 225, 1978.ADSCrossRefGoogle Scholar
  9. 9.
    M. Calderon Ltd., Sebastian House, Sebastian Street, London EC1V OHN.Google Scholar
  10. 10.
    Portescap (UK) Ltd., 204 Elgar Road, Reading, Berks, England.Google Scholar
  11. 11.
    J.A. Cairns, C.L. Desborough, D.F. Holloway, Nucl. Inst. Meths. 88, 239, 1970.ADSCrossRefGoogle Scholar
  12. 12.
    D.W. Wellby, Internal Report, University of Surrey, 1981.Google Scholar
  13. 13.
    J. Morris, to be published.Google Scholar
  14. 14.
    P.L.F. Hemment, E.A. Maydell-Ondrusz, K.G. Stephens, J. Ioannou, J. Butcher, J. Alderman, IBMM 82, Grenoble 1982.Google Scholar
  15. 15.
    E.A. Maydell-Ondrusz, P.L.F. Hemment, K.G. Stephens, S. Moffatt: Electronics Lett. 18, 17, 752, 1982.CrossRefGoogle Scholar
  16. 16.
    M. Tolson, private communication.Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1983

Authors and Affiliations

  • P. L. F. Hemment
    • 1
  • J. E. Mynard
    • 2
  • E. A. Maydell-Ondrusz
    • 1
    • 2
  • K. G. Stephens
    • 1
  1. 1.Department of Electronic and Electrical EngineeringUniversity of SurreyGuildfordEngland
  2. 2.Institute of Nuclear PhysicsKrakowPoland

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