A Compact Cs-Evaporator for High Sensitivity SIMS
In recent years Cs+ primary ions have been used for high sensitivity negative secondary ion mass spectrometry (SIMS) by several workers [1,2,3,], and a Cs ion source assembly for this purpose is now commercially available. To make this ion source interchangeable with other ion sources, e.g., Ar ions, however, one has to employ a specific configuration equipped with isolation valve , etc. In this respect, a compact Cs evaporator which can be mounted in SIMS instruments having a duoplasmatro-type primary ion source would be of practical use as well. One can perform high sensitivity SIMS by means of this Cs evaporator which floods the sample surface with a Cs beam while the sample is bombarded with Ar ions as reported by BERNHEIM and SLODZIAN . This paper describes the development of a compact Cs-ion evaporator for high sensitivity negative SIMS which is compatible with those SIMS instruments equipped with a duoplasmatron ion source.
KeywordsDeposition Rate Tungsten Wire Heat Coil Isolation Valve Exit Aper
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- 6.T. Okutani and R. Shimizu, to be presented at 40th meeting of Soc. Japan Appl. Phys. (Hokkaido, September 30–October 2, 1979).Google Scholar