Abstract
Several theoretical and experimental results on the dynamics of dissociative adsorption and recombinative desorption of hydrogen on silicon are reviewed.
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Brenig, W., Groß, A., Höfer, U., Kratzer, P., Russ, R. (1996). Reaction Dynamics of H2/Si: A 5-D Model. In: Okiji, A., Kasai, H., Makoshi, K. (eds) Elementary Processes in Excitations and Reactions on Solid Surfaces. Springer Series in Solid-State Sciences, vol 121. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-61185-8_1
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DOI: https://doi.org/10.1007/978-3-642-61185-8_1
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