A new hydraulic stroke amplifier for microfluidic components

  • N. Schwesinger
  • S. Pobering
Conference paper


A hydraulic stroke amplifier made of silicon is described. The system consists of two membranes made of different materials. Both are connected by a non compressive liquid, which completely fills out a micro cavity. The first membrane act as driving membrane and possesses of a silicon plate and a piezoceramic plate bonded together. Applying a voltage onto the piezoceramic plate a pressure will be generated into all directions of the cavity. This pressure forces the output membrane to bend in a direction opposite to the cavity. In contradiction to the first membrane, the output membrane is flabby in bending and very small in cross section. The complete volume shift will be given to the bending of the second membrane due to that and the stiffness of the surrounding walls. Stroke amplifications can be achieved as result. In the experiments we found strokes at the output membrane in a range between 60μm and 120μm depending on the pressure generated at the driving membrane. These values are corresponding with an amplification factor of 20 and more in the idling cycle. The device is made by silicon technologies and adapted microtechnologies. It can be advantageously used in several applications due to the material properties of the output membrane. New designs of micropumps, microvalves and other devices using this new working principle are described.


Amplification Factor Compressive Liquid High Deflection Piezoceramic Plate Transversal Piezoelectric Effect 
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Copyright information

© Springer-Verlag Berlin Heidelberg 2000

Authors and Affiliations

  • N. Schwesinger
    • 1
  • S. Pobering
    • 2
  1. 1.TU IlmenauGermany
  2. 2.Opal Jena GmbHGermany

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