A new hydraulic stroke amplifier for microfluidic components
A hydraulic stroke amplifier made of silicon is described. The system consists of two membranes made of different materials. Both are connected by a non compressive liquid, which completely fills out a micro cavity. The first membrane act as driving membrane and possesses of a silicon plate and a piezoceramic plate bonded together. Applying a voltage onto the piezoceramic plate a pressure will be generated into all directions of the cavity. This pressure forces the output membrane to bend in a direction opposite to the cavity. In contradiction to the first membrane, the output membrane is flabby in bending and very small in cross section. The complete volume shift will be given to the bending of the second membrane due to that and the stiffness of the surrounding walls. Stroke amplifications can be achieved as result. In the experiments we found strokes at the output membrane in a range between 60μm and 120μm depending on the pressure generated at the driving membrane. These values are corresponding with an amplification factor of 20 and more in the idling cycle. The device is made by silicon technologies and adapted microtechnologies. It can be advantageously used in several applications due to the material properties of the output membrane. New designs of micropumps, microvalves and other devices using this new working principle are described.
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- Bart et al. (1990), Microfabricated electrohydrodynamic pumps, in: Sensors & Actuators A, 21–23 (1990), p. 193–197.Google Scholar
- Bosch et al. (1993), A silicon microvalve with combined electromagnetic/electrostatic actuation, in: Sensors & Actuators A, 37–38 (1993), p. 684–692.Google Scholar
- Ahn, Allen (1995), Fluid micropumps based on rotary magnetic actuators, in: MEMS’ 95, proceedings, Amsterdam, 408–412.Google Scholar
- van de Pol, F.; Breedfeld, P. (1990), Bond-Graph modeling of an electro-thermo- pneumatic micropump, in: MME, Berlin 1990, S. 19–24.Google Scholar
- Wagner, B.; Quenzer, H. (1996), Bistable microvalve with pneumatically coupled membranes, in: IEEE [Hrsg.], MEMS’ 96, proceedings, San Diego, 384–388.Google Scholar
- Schwesinger, N ., Planarer Tintenstrahldruckkopf mit piezokeramischem Antrieb, in: Feinwerktechnik Mikrotechnik Meßtechnik F & M, 101. Aufl., 1993, 456–460.Google Scholar
- Schwesinger, Bechtel (1998); Micropump for viscous liquids and muds, in: SPIE-proceedings vol. 3515, Santa Clara, 40–45.Google Scholar
- Forke (1991), Eine geregelte Membranpumpe als mikrosystemtechnische Lösung, in: Erstes Symp. Mikrosystemtechnik, Regensburg, 1991, S. 131–140Google Scholar
- Hirata, S.; Ishii, Y. (1996), An ink-jet using diaphragm microactuator, in: IEEE [Hrsg.], MEMS’ 96, proceedings, San Diego, 418–423.Google Scholar
- Jerman (1991 a), Electrical-Activated, Normally-closed Diaphragma Valves, in: Transducers 1991, Technical Digest p. 1045–1048.Google Scholar
- Judy et al. (1991), Surface micromachined micromechanical membrane pump, in: MEMS’ 91, proceedings, 182–186.Google Scholar
- Richter, Zengerle (1993), Properties and applications of a membrane pump with electrostatic drive, in: “Actuator 93” Bremen 1993, p. 28–33.Google Scholar
- Stemme, Stemme (1993); A novel piezoelectric Valve-less Fluid Pump, in: Transducers 1993, digest p. 110–113, Yokohama.Google Scholar