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Modeling the Pull-In Parameters of Electrostatic Actuators with a Novel Lumped Two Degrees of Freedom Pull in Model

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Transducers ’01 Eurosensors XV

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Summary

This paper reports a new approach for the direct calculations of the Pull-In parameters of electrostatic actuators using a lumped two degrees of freedom (L2DOF) Pull-In model. This model benefits from shorter calculation time compared with coupled domains finite-elements simulations and from higher accuracy than the L1DOF Pull-In models. Using this model, the variations of the Pull-In with geometry, such as asymmetries in the beams, can be investigated. The L2DOF Pull-in model results are compared with FEM simulations, provided by MEMCAD™, showing excellent agreement. This provides a fast tool for design optimization of actuators with coupled DOF.

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References

  1. S.D. Senturia, “Microsystems Design”, Kluwer Academic Press, Boston, 2000.

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  2. Y. Nemirovsky and O. Degani, “A methodology and model for the pull-in parameters of electrostatic actuators”, submitted to JMEMS.

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Author information

Authors and Affiliations

  1. Kidron Microelectronics Research Center, Electrical Engineering dept., Technion — Israel Institute of Technology, Haifa, 32000, Israel

    Ofir Bochobza-Degani, Yael Yaniv, Eran Socher & Yael Nemirovsky

Authors
  1. Ofir Bochobza-Degani
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  2. Yael Yaniv
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  3. Eran Socher
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  4. Yael Nemirovsky
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Editor information

Editors and Affiliations

  1. Department of Electrical Engineering & Computer Science Microsensor & Actuator Technology Secr.TIB 3.1, Berlin University of Technology, Gustav-Meyer-Allee 25, D-13355, Berlin, Germany

    Ernst Obermeier

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© 2001 Springer-Verlag Berlin Heidelberg

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Bochobza-Degani, O., Yaniv, Y., Socher, E., Nemirovsky, Y. (2001). Modeling the Pull-In Parameters of Electrostatic Actuators with a Novel Lumped Two Degrees of Freedom Pull in Model. In: Obermeier, E. (eds) Transducers ’01 Eurosensors XV. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_68

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  • DOI: https://doi.org/10.1007/978-3-642-59497-7_68

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-42150-4

  • Online ISBN: 978-3-642-59497-7

  • eBook Packages: Springer Book Archive

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