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Scanning Probe Microscopy: Trends and Image Processing Issues

  • Chapter
Image Technology

Abstract

Scanning probe microscopy (SPM) includes techniques such as scanning tunneling microscopy (STM), atomic force microscopy (AFM), magnetic force microscopy (MFM) and scanning ion conductance microscopy (SICM). Scanning probe microscopes have started a new era in microscopy by providing depth maps at an unprecedented resolution. These versatile devices work in vacuum, air, liquids, and aqueous solutions. Their resolution can be varied from the atomic range to the micrometer range. Scanning probe microscopy is being recognized as a powerful imaging technique in a variety of application areas. Not only can SPM image surface topography, but also other surface characteristics such as magnetic domains, electrical charge, local density of electron states, and surface temperature. Promising results using SPM have been obtained in imaging semiconductors, metals, organic materials, superconductors, and biological samples. SPM is already being used in some industrial applications and there is immense potential for applying it to surface characterization, metrology, and inspection in numerous applications. Image processing techniques are a vital complement to sensor technology in scanning probe microscopes. Image analysis and understanding techniques are essential if the potential of SPM for metrology and industrial inspection is to be realized. In this chapter, we present an overview of the state of the art in SPM with emphasis on image processing techniques for SPM. We outline the principle of operation of different scanning probe microscopes. Issues related to sensor technology are discussed. Commercially available scanning probe microscopes are listed and their features summarized. We review in detail the image processing work that has been done to date in relation to SPM and raise relevant issues. Existing and potential applications of SPM are discussed. Finally, we point out directions for future research in image processing related to SPM.

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  1. Coordinated Science Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, 61801, USA

    Jorge L. C. Sanz

  2. IBM Argentina, Ingeniero Enrique Butty 275, 1300, Buenos Aires, Argentina

    Jorge L. C. Sanz

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Pingali, G.S., Jain, R. (1996). Scanning Probe Microscopy: Trends and Image Processing Issues. In: Sanz, J.L.C. (eds) Image Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-58288-2_19

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