Abstract
Thin-film waveguides for surface acoustic waves (strip or slot waveguides) [11.1, 2] (Figure. 11.1) keep the SAW beams from diverging, and allow us to use the area of substrata more effectively and to change the direction of wave propagation. Therefore, they are widely used for improving the parameters of acoustoelectronic devices. The waveguide effect appears due to the existence of a slow wave region in the substrate [11.3].
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© 1995 Springer-Verlag Berlin Heidelberg
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Biryukov, S.V., Gulyaev, Y.V., Krylov, V.V., Plessky, V.P. (1995). Thin-Film Waveguides for Surface Acoustic Waves. In: Surface Acoustic Waves in Inhomogeneous Media. Springer Series on Wave Phenomena, vol 20. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-57767-3_11
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DOI: https://doi.org/10.1007/978-3-642-57767-3_11
Publisher Name: Springer, Berlin, Heidelberg
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