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Laserchemische Abscheidung von Festkörpern aus der Gasphase

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Angewandte Laserchemie

Part of the book series: Laser in Technik und Forschung ((LASER TECHNIK))

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Zusammenfassung

Die laserchemische Abscheidung von Festkörpern aus der Gasphase kann unmittelbar in der Gasphase und auf einer Festkörperoberfläche erfolgen. Im ersten Fall, der Gasphasennukleation, bilden sich feine Pulver. Ihre mittlere Teilchengröße kann im sub-μm-Bereich liegen. Sie werden dann auch Nanopulver genannt (Abschn. 6.1). Im zweiten Fall der Gasphasenabscheidung werden in der Gasphase oder auf der bestrahlten Oberfläche Spezies gebildet, welche auf dem vorhandenen Festkörper eine neue Oberflächenschicht bilden (Abschn. 6.2). Je nach Art der chemischen Ausgangsverbindungen und Prozeßbedingungen können amorphe oder kristalline Schichten entstehen, in chemisch reiner Form oder als Gemische. Zu den chemischen Elementen, welche alle genannten Arten der Gasphasenabscheidung zeigen, gehört das Silizium. Ausgehend von Siliziumwasserstoffen ist es möglich, Siliziumpulver sowie amorphe und kristalline Siliziumschichten zu erzeugen. Daher bietet sich neben anderen das Siliziumwasserstoffsystem für direkte Verfahrensvergleiche an.

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Stafast, H. (1993). Laserchemische Abscheidung von Festkörpern aus der Gasphase. In: Angewandte Laserchemie. Laser in Technik und Forschung. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-51140-0_6

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