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Recent developments in scanning electron microscopy

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Physikalisch-Technischer Teil

Abstract

A more fundamental understanding of contrast formation in the scanning electron microscope (1, 2, 3, 4) will be described briefly in this paper, together with recent applications and instrumental developments.

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References

  1. Ardenne, M. von: Z. Physik 109, 553 (1938).

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G. Möllenstedt H. Niehrs E. Ruska

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© 1960 Springer-Verlag Berlin Heidelberg

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Everhart, T.E., Smith, K.C.A., Wells, O.C., Oatley, C.W. (1960). Recent developments in scanning electron microscopy. In: Möllenstedt, G., Niehrs, H., Ruska, E. (eds) Physikalisch-Technischer Teil. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-50195-1_84

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  • DOI: https://doi.org/10.1007/978-3-642-50195-1_84

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-50196-8

  • Online ISBN: 978-3-642-50195-1

  • eBook Packages: Springer Book Archive

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