Abstract
A more fundamental understanding of contrast formation in the scanning electron microscope (1, 2, 3, 4) will be described briefly in this paper, together with recent applications and instrumental developments.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Ardenne, M. von: Z. Physik 109, 553 (1938).
Zworykin, V. K., J. Hillier and R. L. Snyder: ASTM Bull. 117, 15 (1942).
McMullan, D.: Proc. Inst. Electr. Eng. 100, Pt. II, 245 (1953).
Smith, K. C. A., and C. W. Oatley: Brit. J. appl. Phys. 6, 391 (1955).
Sternglass, E. J.: Physic. Rev. 95, 345 (1954).
Oatley, C. W., and T. E. Everhart: J. Electronics 2, 568 (1957).
Author information
Authors and Affiliations
Editor information
Rights and permissions
Copyright information
© 1960 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Everhart, T.E., Smith, K.C.A., Wells, O.C., Oatley, C.W. (1960). Recent developments in scanning electron microscopy. In: Möllenstedt, G., Niehrs, H., Ruska, E. (eds) Physikalisch-Technischer Teil. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-50195-1_84
Download citation
DOI: https://doi.org/10.1007/978-3-642-50195-1_84
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-50196-8
Online ISBN: 978-3-642-50195-1
eBook Packages: Springer Book Archive