Abstract
Quantitative information about the spatial element distribution in thin solid layers and thin-film systems has become of great importance in many fields of pure and applied research and of modern technological developments. Thus, experimental studies on the physics of semiconductors are, to a large extent, performed with thin films. The investigation of diffusion processes in solids requires the determination of shallow concentration profiles. As to refer to more applied aspects, sandwich-like thin film structures are of rapidly growing importance not only for microelectronics, but also for antireflecting or selectively transparent optical films, low friction coatings for dry lubrication, hard material protective layers for mechanical tools, etc.
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Oechsner, H. (1984). Introduction. In: Oechsner, H. (eds) Thin Film and Depth Profile Analysis. Topics in Current Physics, vol 37. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-46499-7_1
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DOI: https://doi.org/10.1007/978-3-642-46499-7_1
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