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Coupled Electrostatic-Mechanical Systems

  • Manfred KaltenbacherEmail author
Chapter

Abstract

In electrostatic-mechanical systems, the structure is subject both to rigid motions and elastic deformations by means of the electrostatic force.

Keywords

Electrostatic Force Electric Field Intensity Electrostatic Energy Iteration Loop Mechanical Displacement 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    R. Zengerle, S. Kluge, M. Richter, R. Richter, A bidirectional silicon micropump, Proceedings of Sensor95 (Nuremberg) (1995), pp. 727–732Google Scholar
  2. 2.
    G. Wunsch, Feldtheorie, 2 (Verlag Technik, Berlin, 1975)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2015

Authors and Affiliations

  1. 1.Institute of Mechanics and MechatronicsVienna University of TechnologyViennaAustria

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