Skip to main content
  • 1884 Accesses

Abstract

Both the uniform and nonuniform distribution theories of cleanroom have been introduced. In order to meet the need of practical application, the method and procedure of specific analysis calculation will be given in this chapter.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 169.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Hardcover Book
USD 219.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Shigeharu H (1967) Local dust collection for the environment in clean sterile workshop. Mag Building Equip 2:46–57 (In Japanese)

    Google Scholar 

  2. Shiobin K (1971) Selection method of air cleaning devices for different application. Jpn Air Cond Heat Refrig News 11(9):103–110 (In Japanese)

    Google Scholar 

  3. Xu ZL (1994) Design of cleanroom. Seismological Press, Beijing, pp 12–125 (In Chinese)

    Google Scholar 

  4. Schütz H, Raüme R (1969) Staubfreie Arbeitsplätze für die Feiwerktechnik. Feinwerktechnik, Oktober, pp 444–449 (In German)

    Google Scholar 

  5. Kosuke H (1973) Planning and design of cleanroom. Jpn Air Cond Heat Refrig News 13(1):75–88 (In Japanese)

    Google Scholar 

  6. Humikura A (1967) Design and construction of cleanroom. Jpn Air Cond Heat Refrig News 13(17):20–29 (In Japanese)

    Google Scholar 

  7. Нонезов РТ, Знаменский РЕ (1973) Обеспыливание воздушной среди в”Чесмых комнатах”. Водоснабжение и Санитарная Техника 3:29–32 (In Russian)

    Google Scholar 

  8. Schichr HH (1973) Clean room technology-principles and applications. Sulzer Techn Rev 1:3–15

    Google Scholar 

  9. Wang SG (1997) Fresh air and control of fresh air systems. J HV&AC 1:23–28 (In Chinese)

    Google Scholar 

  10. Кокорев НП (1972) Гигиени ческая оценка без оконых и бесфонарных промышленных зданий. Гигиена и Санитария 6:25–28 (In Russian)

    Google Scholar 

  11. Kanzi S, Keiji K (1979) Design basis of air cleaning system indoors. Jpn Air Cond Heat Refrig News 19(9):68–76 (In Japanese)

    Google Scholar 

  12. Fanger PO (2000) IAQ in the 21st century: search for excellence (trans: Yu Xiaoming). J HV&AC 30(3):32–35. (In Chinese)

    Google Scholar 

  13. Kazuya H et al. (1974) Air conditioning and air cleaning. (In Japanese)

    Google Scholar 

  14. Tuve GL (1953) Air velocity in ventilating jets (Heating, Piping and Air Conditioning, No.6360). Special Science and Technology Information Collection (HVAC). (In Chinese)

    Google Scholar 

  15. Shunzou B, Tora B (1973) Design of cleanroom. Jpn Air Cond Heat Refrig News 13(1):89–95 (In Japanese)

    Google Scholar 

  16. Xu ZL (1996) Essential measures to insure cleanliness in computer rooms. J HV&AC 26(6):65–69 (In Chinese)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

Copyright information

© 2014 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Xu, Z. (2014). Design Calculation of Cleanroom. In: Fundamentals of Air Cleaning Technology and Its Application in Cleanrooms. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-39374-7_13

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-39374-7_13

  • Published:

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-39373-0

  • Online ISBN: 978-3-642-39374-7

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics