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Magnetoresistive Sensors for Surface Scanning

  • Chapter
Giant Magnetoresistance (GMR) Sensors

Part of the book series: Smart Sensors, Measurement and Instrumentation ((SSMI,volume 6))

Abstract

This chapter provides an overview on several techniques used for surface imaging, including SQUIDs, Hall-effect sensors, Giant magnetoimpedance sensors, and magnetoresistive (MR) sensors. Among all magnetic field sensors, only SQUIDs and MR devices have the potential to localize buried and non-visual field sources (such as defects in integrated circuits or magnetic field sources in biological environments. In particular, we describe how MR sensors have been used with advantage for integrated circuit (IC) mapping, with resolution below 500 nm and sensitivity to detect currents as low as 50 nA and have been used for many applications requiring low magnetic field detection. Challenges and experimental considerations on integration of MR sensors on a commercial analysis tool are provided here. Examples obtained with real devices demonstrate how Scanning Magnetic Microscopy has become an established failure analysis technique for visualizing current paths in microelectronic devices.

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Authors and Affiliations

  1. INESC-MN and IN, Rua Alves Redol 9, 1000-029, Lisboa, Portugal

    D. C. Leitão, S. Cardoso & P. P. Freitas

  2. INL - International Iberian Nanotechnology Laboratory, Av. Mestre José Veiga, 4715-31, Braga, Portugal

    J. Borme

  3. Neocera, Beltsville, MD, USA

    A. Orozco

  4. Instituto Superior Tecnico (IST), Av. Rovisco Pais, 1000-029, Lisboa, Portugal

    S. Cardoso & P. P. Freitas

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  1. D. C. Leitão
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Leitão, D.C., Borme, J., Orozco, A., Cardoso, S., Freitas, P.P. (2013). Magnetoresistive Sensors for Surface Scanning. In: Giant Magnetoresistance (GMR) Sensors. Smart Sensors, Measurement and Instrumentation, vol 6. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-37172-1_11

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  • Online ISBN: 978-3-642-37172-1

  • eBook Packages: EngineeringEngineering (R0)

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