Abstract
We addressed the question of how to assign confidence limits to the measured trajectory of a moving MEMS membrane. This was done by calibrating our SSWLI setup using a traceable piezoelectric transducer as a transfer standard. We calibrated our SSWLI setup for quasi-dynamic measurements of vertical movements up to 14 μm with standard uncertainty of 9.4 nm.
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Heikkinen, V.V. et al. (2014). Traceable Quasi-dynamic Stroboscopic Scanning White Light Interferometry. In: Osten, W. (eds) Fringe 2013. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36359-7_86
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DOI: https://doi.org/10.1007/978-3-642-36359-7_86
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-36358-0
Online ISBN: 978-3-642-36359-7
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