Introduction
Low coherence interferometry (LCI) is a well known measurement technique that allows shape measurements with a nanometer resolution. The range of LCI is theoretically unlimited but in practice it is determined by the length of a scanning motion along the measurement axis. The resolution of the measurement is determined by the scanning resolution, the spectral characteristics of the light source and the fringe analysis algorithm.
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Salbut, L., Tomczewski, S., Pakula, A. (2014). VIS-NIR Full-Field Low Coherence Interferometer for Surface Layers Non-destructive Testing and Defects Detection. In: Osten, W. (eds) Fringe 2013. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36359-7_174
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DOI: https://doi.org/10.1007/978-3-642-36359-7_174
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