Fringe 2013 pp 559-562 | Cite as

Measurements of Three-Dimensional Freeform and Aspheric Geometries

Introduction

The ›NMM-1‹ nanomeasuring machine, developed at the Technical University of Ilmenau, Institute for Process Measurement and Sensor Technology and produced by SIOS Messtechnik GmbH, provides the opportunity for conducting many different types of measurements in nanometer range [1]. The NMM-1’s excellent metrological characteristics are being exploited for calibrating transfer standards, such as step-height standards, one-dimensional and two-dimensional lateral-displacement standards, flatness standards and roughness standards, at several government institutions around the world. The NNM-1 exhibits 0.1nm resolution in a measurement volume of 25x25x5mm3 and can be equipped with various types of probe systems [2], [3].

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References

  1. 1.
    Jäger, G.: Three-Dimensional Nanopositioning and Nanomeasuring Machine with a Resolution of 0.1 nm. Optoelectronics, Instrumentation and Data Processing 46, 318–323 (2010)CrossRefGoogle Scholar
  2. 2.
    Jäger, G., Manske, E., Hausotte, H.-J.: The metrogical basis and operation of Nanopositioning and Nanomeasuring Machine NMM-1. Technisches Messen 76(5), 227–233 (2009)CrossRefGoogle Scholar
  3. 3.
    Manske, E., Jäger, G., Hausotte, T., Füßl, R.: Recent developments and challenges of nanopositioning and nanomeasuring technology. Meas. Sci. Technol. 23(7) (2012)Google Scholar
  4. 4.
    Dai, G., Bütefisch, S., Pohlenz, F., Danzebrink, H.-U.: A high precision micro/nano CMM using piezoresistive tactile probes. Meas. Sci. Technol. 20(8) (2009)Google Scholar
  5. 5.
    Hausotte, T., Percle, B., Jäger, G.: Advanced three-dimensional scan methods methods in the nanopositioning and nanomeasuring machine. Meas. Sci. Technol. 20, 084004 (2009)Google Scholar
  6. 6.
    Bos, E.: Nanometre level uncertainty with the Gannen-XP. Mikroniek 3, 28–32 (2008)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  1. 1.SIOS Meßtechnik GmbHIlmenauGermany

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