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Applied Scanning Probe Methods pp 253–276Cite as

Displacement and Strain Field Measurements from SPM Images

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Part of the book series: NanoScience and Technology ((NANO))

Abstract

Rapid miniaturization of microelectronics, microtechnology, and nanotechnology products has revealed new challenges corresponding to thermo-mechanical reliability. Besides accelerated testing of products and components and numerical finite element analysis, mainly deformation measurement methods are looked for. They allow us to understand response of components to environmental and functional thermo-mechanical loading and are part of advanced reliability studies.

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Authors
  1. Jürgen Keller
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  2. Dietmar Vogel
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  3. Andreas Schubert
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  4. Bernd Michel
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© 2004 Springer-Verlag Berlin Heidelberg

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Keller, J., Vogel, D., Schubert, A., Michel, B. (2004). Displacement and Strain Field Measurements from SPM Images. In: Applied Scanning Probe Methods. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-35792-3_8

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