Tip Characterization for Dimensional Nanometrology

Abstract

Technological trends are requiring dimensional metrology of features smaller than a micrometer in a number of industries. In some cases (e.g., pharmaceuticals and other biological or medical applications) the nanometer size scale is determined by the fact that function is driven by chemistry, and the size scale is therefore that of molecules. In other cases (semiconductor electronics, data storage) sizes of components are driven to the smallest manufacturable because performance (speed, data density) improves with miniaturization. Advanced materials, ceramics, and composites increasingly may benefit from the assessment of grain size and other aspects of nanostructure.