Abstract
Microbeams are simple on-chip test structures used for thin film and MEMS materials characterization. Profilometry can be combined with Euler-Bernoulli (EB) beam theory to extract material parameters, like the E-modulus. Characterization of time-dependent microbeam bending is required, though non-trivial, as it involves long term sub-microscale measurements. Here we propose an enhanced global digital image correlation (GDIC) procedure to analyze time-dependent microbeam bending. Using GDIC we extract the full-field curvature profile from optical profilometry data of thin metal microbeam bending experiments, whilst simultaneously correcting for rigid body motion resulting from drift. This work focusses on the implementation of this GDIC procedure and evaluation of its accuracy through a numerical assessment of the proposed methodology.
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Acknowledgments
This research was carried out under Project number M62.2.08SDMP12 in the framework of the Industrial Partnership Program on Size Dependent Material Properties of the Materials innovation institute M2i (http://www.m2i.nl) and the Foundation of Fundamental Research on Matter (FOM), which is part of the Netherlands Organization for Scientific Research (NWO).
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Bergers, L., Neggers, J., Geers, M., Hoefnagels, J. (2013). Enhanced Global Digital Image Correlation for Accurate Measurement of Microbeam Bending. In: Altenbach, H., Kruch, S. (eds) Advanced Materials Modelling for Structures. Advanced Structured Materials, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-35167-9_5
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DOI: https://doi.org/10.1007/978-3-642-35167-9_5
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