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Using SOM Maps for Clustering and Visualization of Diamond Films Deposited by HFCVD Process

  • Leandro A. Pasa
  • José Alfredo F. Costa
  • Marcelo C. Tosin
  • Fábio A. Procópio de Paiva
Part of the Lecture Notes in Computer Science book series (LNCS, volume 7637)

Abstract

Diamond is a material with unique properties to be exploited in various applications. The deposition of diamond thin films on surfaces enables its use in mechanics, electronics and optics, among others. To ensure the quality of crystals is important to control the parameters involved in the deposition process. In this study we used the SOM algorithm for clustering and visualization of the parameters of a reactor for deposition of diamond thin films, which together with scanning electron microscopy and Raman spectroscopy, collaborated in reactor calibration. The results show the importance of temperature in this process.

Keywords

SOM hot filament chemical vapour deposition diamond thin films 

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Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • Leandro A. Pasa
    • 1
  • José Alfredo F. Costa
    • 2
  • Marcelo C. Tosin
    • 3
  • Fábio A. Procópio de Paiva
    • 4
  1. 1.UTFPRMedianeiraBrasil
  2. 2.Departamento de Engenharia ElétricaUFRNNatalBrasil
  3. 3.Departamento de Engenharia ElétricaUELLondrinaBrasil
  4. 4.IFRNNatalBrasil

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