Abstract
Development of multi-channel microelectrodes for interfacing the vestibular system makes high demands on fabrication technology. To be able to insert such electrodes in the semicircular canals, adequate stiffness of the structures is required. Moreover, a double-sided arrangement of the electrode contacts is desired, in order to increase selectivity. In this work, two approaches are presented and compared to create such electrode systems. While using a double-sided photolithography process is a suitable method to create very thin and flexible monolithic double-sided electrode structures, application in a vestibular prosthesis demands fabrication of thicker and stiffer electrodes. For this purpose, sandwich electrode technology is the preferred method. Here, two single-sided polyimide thin-film structures are precisely glued together to form a sandwich-like electrode with active contacts on both sides of the structure. For vestibular prostheses, this technology allows a faster and more reliable production of vestibular microelectrodes.
This work was supported by the European Commission under Grant EU FP7 ICT 225929.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
DiGiovanna, J., Gong, W., Haburcakova, C., Koegler, V., Carpaneto, J., Genovese, V., Merfeld, D., Demosthenous, A., Guyot, J.P., Hoffmann, K.-P., Berthoz, A., Morari, M., Micera, S.: Development of a closed-loop neural prosthesis for vestibular disorders. Journal of Automatic Control 20, 27–32 (2010)
Doerge, T., Poppendieck, W., Hoffmann, K.-P.: A Process for Microfabrication of Double-Sided Polyimide Electrodes. In: Annual Conference of the German Society for Biomedical Engineering, Rostock (October 8, 2010)
Hoffmann, K.-P., Poppendieck, W., Doerge, T., Hanauer, M., Gong, W., Haburcakova, C., Merfeld, D.M., Micera, S.: Design of Microelectrodes for a Vestibular Prosthesis. In: Annual Conference of the German Society for Biomedical Engineering, Rostock (October 8, 2010)
Stieglitz, T., Beutel, H., Schüttler, M., Meyer, J.U.: Micromachined, Polyimide-Based Devices for Flexible Neural Interfaces. Biomedical Microdevices 2, 283–294 (2000)
Hoffmann, K.-P., Koch, K.P., Dörge, T., Micera, S.: New Technologies in Manufacturing of Different Implantable Microelectrodes as an Interface to the Peripheral Nervous System. In: Proceedings of the BioRob., Pisa, pp. 414–419 (2006)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2013 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Poppendieck, W., Krob, MO., Welsch, C., Merfeld, D., Micera, S., Hoffmann, KP. (2013). Sandwich Electrode Technology for Precise Vestibular Electrodes with High Reliability. In: Pons, J., Torricelli, D., Pajaro, M. (eds) Converging Clinical and Engineering Research on Neurorehabilitation. Biosystems & Biorobotics, vol 1. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-34546-3_219
Download citation
DOI: https://doi.org/10.1007/978-3-642-34546-3_219
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-34545-6
Online ISBN: 978-3-642-34546-3
eBook Packages: EngineeringEngineering (R0)