Abstract
With MEMS (Micro electro-mechanical systems) entering fast moving consumer markets, the need for a more efficient design approach becomes apparent. One of the biggest challenges in this context is that virtually every MEMS-product requires its own specifically designed and optimized manufacturing technology. The only currently feasible solution to the problems arising from this so-called “MEMS-law” seems to be the extensive modularization and reuse of existing manufacturing technologies.
PDES (Process Development Execution Systems) provide a framework to handle MEMS manufacturing technologies. In this article a new visual approach to process modeling built on top of PDES along with a simulation interface that allows setting up and performing virtual experiments and optimization is presented. The new approach supports the device engineer in selecting an appropriate manufacturing technology based on a set of device-cross-sections. For this purpose dedicated software tools have been developed that are able to analyze the cross-sections and map the analysis results to specific technologies. The results are used to synthesize abstract process-templates that form the basis for the development of new application specific fabrication processes. The new approach is particularly suited for fabless MEMS companies that are in need to develop application specific manufacturing processes.
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References
Senturia, S.: Perspectives on MEMS Past and Future: the Tortuous Pathway from Bright Ideas to Real Products. In: Digest Tech. Papers Transducers 2003 Conference, Boston, USA, June 8-12, pp. 10–15 (2003)
van Heeren, H.: Appearance of a Moore’s law in mems? Trends affecting the MNT supply chain. In: Proc. of SPIE: MEMS, MOEMS, and Micromachining II, vol. 6186(1) (2006)
Yole Developpement: Status of the MEMS Industry. Yole Developpement (2010)
Schmidt, T., Hahn, K., Mielke, M., Brück, R., Ortloff, D., Popp, J.: Distributed and Collaborative Product Engineering for MEMS. International Journal of Microelectronics and Computer Science 1(3) (2010)
Schröpfer, G., Lorenz, G., Rouvillois, S., Breit, S.: Novel 3d modeling methods for virtual fabrication and eda compatible design of mems via parametric libraries. J. of Micromechanics and Microengineering 20(6) (2010)
Schmidt, T.: Technologiemanagement und anwendungsspezifische Prozessentwicklung in der Mikrosystemtechnik. Doctoral thesis, University of Siegen (2011)
Ackoff, R.L.: From data to wisdom. Journal of Applied Systems Analysis 16, S. 3–S. 9 (1989)
Bellinger, G., Castro, D., Mills, A.: Data, Information, Knowledge, and Wisdom. Version (2004), http://www.systemsthinking.org/dikw/dikw.htm (last inspected: December 18, 2011)
Galison, P.: Image and logic: a material culture of microphysics. University of Chicago Press (1997)
Hahn, K., Wagener, A., Popp, J., Brück, R.: Process Management and Design for MEMS and Microelectronics Technologies. In: Proc. of SPIE: Microelectronics: Design, Technology, and Packaging, vol. 5274 (2003)
Schmidt, T., Mielke, M., Hahn, K., Brück, R., Ortloff, D., Popp, J.: A visual approach on MEMS process modeling using device cross-sections. In: Proc. of Microtech. (2010)
Schmidt, T., Hahn, K., Brück, R.: A Knowledge Based Approach for MEMS Fabrication Process Design Automation. In: Proc. of IEMT (2008)
Ortloff, D., Popp, J., Schmidt, T., Brück, R.: Process development support environment: a tool suite to engineer manufacturing sequences. Int. J. Computer Mater. Sci. and Surf. Eng. 2009 (IJCMSSE 2009) 2, 312–334 (2009)
Ortloff, D., Popp, J., Laughlin, E., Greiner, K.: Efficient virtual manufacturing for MNT. In: Proc. of COMS 2010 (2010)
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Brück, R., Schmidt, T. (2013). Application Specific Process Development for MEMS Design and Fabrication. In: Fathi, M. (eds) Integration of Practice-Oriented Knowledge Technology: Trends and Prospectives. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-34471-8_18
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DOI: https://doi.org/10.1007/978-3-642-34471-8_18
Publisher Name: Springer, Berlin, Heidelberg
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