The properties of charged-particle beams, representing ensembles of trajectories, are investigated. It is shown that the beam properties depend strongly on the emission characteristics of the source such as the brightness or emittance, respectively. The emittance and the acceptance of beam guiding elements are discussed in detail, and it is shown that the emittance domain of an optical element must be embedded entirely in the so-called acceptance domain of the subsequent element in order to achieve maximum throughput.
KeywordsOptical Path Length Paraxial Approximation Aperture Plane Recording Plane Caustic Curve
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