Abstract
Nano-positioning technology is one of the key technologies in frontier science, engineering technology. The control method and principle of super large optical mirror surface form nano-positioning technology are analyzed. For measurement and control system, the sensor design and the design for the parameters of the electric displacement detector are discussed. Positioning precision is: surface form control error is just 50nm; drift error is lower than 5nm.
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References
Jiao, C., Li, S., Xie, X., et al.: Controllability of removal function in the ion beam figuring process for optics mirrors. Optical Technique 34(5), 651–654 (2008)
Zhou, L., Dai, Y., Xie, X., et al.: Model and method to determine dwell time in ion beam figuring. Nanotechnology and Precision Engineering 5(2), 107–112 (2007)
Pahk, H.J., Lee, D.S., Park, J.H.: Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation. International Journal of Machine Tools & Manufacture 41(1), 123–131 (2001)
Uchida, N.: A vertical X-Y stage for x- ray lithography using SOR. Bull. Japan Soc. of Prec. Eng. 22(2), 102–108 (1988)
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© 2013 Springer-Verlag Berlin Heidelberg
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Liu, X., Zhao, D. (2013). Super Large Optical Mirror Surface Form Nano-positioning Technology Based on Displacement Sensor Detection. In: Jin, D., Lin, S. (eds) Advances in Mechanical and Electronic Engineering. Lecture Notes in Electrical Engineering, vol 178. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31528-2_20
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DOI: https://doi.org/10.1007/978-3-642-31528-2_20
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-31527-5
Online ISBN: 978-3-642-31528-2
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