Abstract
Pull-in voltage measurements are used in this work as the transduction mechanism to build a novel microelectromechanical system (MEMS) inclinometer. By successively bringing the microstructure to pull-in while measuring the pull-in voltage allows the detection of external accelerations. Moreover, the availability of asymmetric pull-in voltages that depend on the same mechanical structure and properties enables the implementation of an auto-calibrated thermal compensated inclinometer. The thermal compensation method is described and it relies on the measurement of pull-in voltages only. Both simulations and experiments are used to validate this novel approach and first results show a sensitivity of 50mV/º and a resolution of 0.006º.
Keywords
- Pull-In voltage
- Inclinometer
- MEMS
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© 2012 Springer-Verlag Berlin Heidelberg
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Alves, F.S., Dias, R.A., Cabral, J., Rocha, L.A. (2012). Autonomous MEMS Inclinometer. In: Kamel, M., Karray, F., Hagras, H. (eds) Autonomous and Intelligent Systems. AIS 2012. Lecture Notes in Computer Science(), vol 7326. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31368-4_4
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DOI: https://doi.org/10.1007/978-3-642-31368-4_4
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-31367-7
Online ISBN: 978-3-642-31368-4
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