Conclusions and Recommendations
In this work, we have (i) developed, (ii) tested and (iii) made use of a physical model accounting for the behavior of high-frequency Photomodulated Optical Reflectance (PMOR) on homogeneously and non-homogeneously doped silicon. Sections 8.1, 8.2 and 8.3 below summarize the most important results of each of these tasks. In Sect. 8.4, we give an outlook on future work.