Application of the Model to Carrier Profiling

  • Janusz Bogdanowicz
Part of the Springer Theses book series (Springer Theses)


In this chapter, the insights of the previous chapters are put together in order to solve the inverse problem. In other words, in this chapter, we show how to deduce information about unknown active doping profiles based on TP measurements.


Doping Concentration Layer Plasma Thermal Component Junction Depth Dope Layer 
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  1. 1.
    J. Bogdanowicz, F. Dortu, T. Clarysse, W. Vandervorst, E. Rosseel, N.D. Nguyen, D. Shaughnessy, A. Salnik, L. Nicolaides, Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves. J. Vac. Sci. Technol. B 28(1), C1C1–C1C7 (2010)CrossRefGoogle Scholar
  2. 2.
    M. Heath, Scientific Computing, an Introductory Survey (McGraw-Hill, New York, 1997)Google Scholar
  3. 3.
    M. Abramowitz, I. Stegun, Handbook of Mathematical Functions (Dover, New York, 1964)zbMATHGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  1. 1.IMECLeuvenBelgium

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