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Theory of Perturbation of the Reflectance

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Photomodulated Optical Reflectance

Part of the book series: Springer Theses ((Springer Theses))

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Abstract

In this chapter, we assume a small perturbation of the complex refractive index \(\tilde{n}(x,y,z,t)\) is somehow generated (e.g. by doping, optically injected carriers and/or heat,...) in a homogeneous silicon sample and we calculate how this perturbation impacts the reflectance \(R(x,y,t)\) of a probe laser shining on the sample.

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Notes

  1. 1.

    Given the large refractive index contrast both at the air-oxide interface and at the oxide-silicon interface, multireflection formula [2] must be considered in the oxide layer (large reflection coefficients at both interfaces)

References

  1. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1970)

    Google Scholar 

  2. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, Chichester, 2007)

    Google Scholar 

  3. B.O. Seraphin, N. Bottka, Band-structure analysis from electro-reflectance studies. Phys. Rev. 145(2), 628–636 (1966). doi:10.1103/PhysRev.145.628

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  4. D.E. Aspnes, in Handbook on Semiconductors: Modulation Spectroscopy, ed. by T.S. Moss (North Holland, New York, 1980)

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  5. D.E. Aspnes, A. Frova, Influence of spatially dependent perturbations on modulated reflectance and absorption of solids (reprinted in solid-state commun, vol 7, pg 155–159, 1969). Solid State Commun. 88(11–12), 1061–1065 (1993)

    Article  ADS  Google Scholar 

  6. T. Yasuda, D.E. Aspnes, Optical-standard surfaces of single-crystal silicon for calibrating ellipsometers and reflectometers. Appl. Opt. 33(31), 7435–7438 (1994)

    Article  ADS  Google Scholar 

  7. R. Hull (ed.), Properties of Crystalline Silicon, Emis Datareviews Series (INSPEC, London, 1999a)

    Google Scholar 

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Correspondence to Janusz Bogdanowicz .

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© 2012 Springer-Verlag Berlin Heidelberg

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Bogdanowicz, J. (2012). Theory of Perturbation of the Reflectance. In: Photomodulated Optical Reflectance. Springer Theses. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-30108-7_2

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  • DOI: https://doi.org/10.1007/978-3-642-30108-7_2

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-30107-0

  • Online ISBN: 978-3-642-30108-7

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