Direct Encapsulation of OLED on CMOS

Chapter

Abstract

The integration of organic light-emitting diodes (OLED) into semiconductor technology (CMOS) requires a protection, called encapsulation, which covers the OLED forming a barrier against the environment (oxygen, moisture, mechanical). The essential encapsulation technology has to be suitable for full-wafer production regarding low chip cost, fast throughput and accurate processing. A combination of thin-film and direct encapsulation might result in a proper protection for organic devices, containing the advantages of a good barrier, mechanical protection, easy extension with light-forming components and a pre-protection. Aligned adhesive wafer bonding technology is characterized for this hybrid encapsulation approach. A flow of fabrication steps is discussed, which builds up a sandwich of a CMOS wafer with the OLED and a cover glass wafer with color filter structures. This process flow manufactured an OLED microdisplay, which is implemented in a head-mounted display demonstrator.

Keywords

High Occupied Molecular Orbital Lower Unoccupied Molecular Orbital Complementary Metal Oxide Semiconductor Color Filter Water Vapor Transmission Rate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  1. 1.Fraunhofer Institute for Photonic Microsystems (IPMS)DresdenGermany

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