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Dynamic Analysis of Nonlinear Elasticity Microbeam with Electromechanical Couping

  • Yang Liu
  • Peng Jian-she
  • Xie Gang
  • Luo Guang-bing
Part of the Advances in Intelligent and Soft Computing book series (AINSC, volume 145)

Abstract

The material nonlinearity is one of the many nonlinear factors in MEMS(Micro Electro Mechanical System). The microbeam is a basic component in MEMS. In this paper, the influence of nonlinear elasticity factor has been considered in dynamic analysis of the microbeam. A nonlinear modal is set up that as a clamped-clamped microbeam subjected to a transverse electrostatic force. The nonlinear governing equation is transformed into a linear differential equation system through the use of Linstedt-Poincaré perturbation method, which are then solved by using the Galerkin method. Numerical results show that, the nonlinear factor can’t be ignored when the number of the nonlinear material constant, B is big. The amplitude and the period of the microbeam will increase when the number of B is increasing.

Keywords

MEMS microbeam nonlinear elasticity dynamic analysis Linstedt-Poincaré method Galerkin method 

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Copyright information

© Springer-Verlag GmbH Berlin Heidelberg 2012

Authors and Affiliations

  • Yang Liu
    • 1
  • Peng Jian-she
    • 2
  • Xie Gang
    • 1
  • Luo Guang-bing
    • 3
  1. 1.Department of Physics and Electronic InformationChina West Normal UniversityNan ChongChina
  2. 2.Department of Industrial ManufacturingCheng Du UniversityCheng DuChina
  3. 3.Traction Power State Key Laboratory of Southwest Jiao tong UniversityCheng DuChina

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