Challenges and Advances in Instrumentation of UHV LT Multi-Probe SPM System
The progress of nanoscience and nanotechnology can be realized only through continued advances and utilization of instruments and techniques for characterizing material properties and manipulating material and device at nanoscale. The UHV LT Multi-Probe SPM system with high resolution SEM has been developed to meet such challenges. This integrated instrument bridges dimensions from the centimeter to atomic scale, and provides an unprecedented platform for local, non-destructive transport measurements and for building, manipulating and function-testing complex nanoelectronics and nanoscale machineries. It also enables combining many different techniques for characterizing sample conductance, topography, chemical, optical or magnetic properties with complementary information at the same position or on the same nanodevice. Design and development of such complex systems pose many issues and challenges. This chapter will discuss some of the issues faced, solutions reached and advances made. Examples include: (1) Disturbance by magnetic material and magnetic field of SEM imaging and coordination of SEM/SPM position, and their influence on and disturbance of SAM spectra and SAM mapping. The design and use of non-magnetic motors for multi-probe modules will be presented and discussed. (2) Tip holder and sample holder design for easy handling, better mechanical stability over the temperature range and better thermal contact and the versatility of the sample holder with multiple contacts. (3) Use of optical fiber as one of the probe modules, and positioning of the fiber probe. CL spectra and CL mapping results will be presented.
KeywordsSample Stage High Frequency Signal Good Thermal Contact Cathode Luminescence High Resonance Frequency
The author would like to thank academy and industry partners for their collaboration at various stages of the instrument development. They are CNMS at Oak Ridge National Lab of USA; Department of Physics, Xiamen University of China; SPECS Surface Nano Analyses GmbH of Germany; and UNISOKU Co., Ltd. of Japan. A portion of the research was conducted at the Center for Nanophase Materials Sciences, which is sponsored at Oak Ridge National Laboratory by the Office of Basic Energy Sciences, U.S. Department of Energy. The author would like to specially thank Dr. An-Ping Li of CNMS, ORNL for his cooperation and support. The author would like to thank Prof. Junyong Kang of Department of Physics, Xiamen University, China for his cooperation and support. The author also would like to thank the people who worked on various projects at RHK Technology, Inc. Dr. Sergii Priadkin, a staff scientist, who worked at the initial stage of non-magnetic motor design; Gennady Royzenblat and Emanuel Chirila, the mechanical engineers, who worked on the motor and systems design and drawings; and Xun Pan, the senior technician, who assembled and did all the initial test of those motors.
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