Abstract
An atomic scale multiprobe interconnection machine is described in the context of building of the molecular devices. It combines various techniques for fabrication and surface analysis. The characterization part consists of low temperature scanning tunneling microscope (LT-STM), four probes variable temperature scanning tunneling microscope (Multiprobe), high resolution scanning electron microscope (SEM). The fabrication part has field ion microscope (FIM), evaporators and nanoimprinter. The characteristics of every part of the instrument and the preliminary experiments on Si(100) surface are discussed.
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Neucheva, O.A., Thamankar, R., Yap, T.L., Troadec, C., Deng, J., Joachim, C. (2012). Atomic Scale Interconnection Machine. In: Joachim, C. (eds) Atomic Scale Interconnection Machines. Advances in Atom and Single Molecule Machines. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-28172-3_3
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DOI: https://doi.org/10.1007/978-3-642-28172-3_3
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