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Nanometer-Scale Four-Point Probe Resistance Measurements of Individual Nanowires by Four-Tip STM

  • S. Hasegawa
  • T. Hirahara
  • Y. Kitaoka
  • S. Yoshimoto
  • T. Tono
  • T. Ohba
Conference paper
Part of the Advances in Atom and Single Molecule Machines book series (AASMM)

Abstract

We present a review of our recent results about transport properties of nanowires measured by a four-tip scanning tunneling microscope (STM) installed with metal-coated carbon nanotube (CNT) tips. We first present our custom-made apparatus (with UNISOKU Co.) as well as CNT tips, and then some case studies with two different samples, Co-silicide nanowires self-assembled on Si(110) surface and Cu nanowires made by damascene processes used in LSI industry. It is shown that the four-tip STM with CNT tips is versatile and powerful for measuring the conductivity of individual nanostructures.

Keywords

Contact Resistance Probe Spacing Scanning Tunneling Microscope Voltage Probe Actuator Unit 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

The present work was done in collaboration with UNISOKU Co., Ltd. in construction of the four-tip STM and Prof. M. Katayama in fabricating CNT tips. It was fully supported by the SENTAN Program of the Japan Science and Technology Agency (JST), and also by Grants-in-Aid for Scientific Research and A3 Foresight Program from the Japanese Society for the Promotion of Science (JSPS).

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Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • S. Hasegawa
    • 1
  • T. Hirahara
    • 1
  • Y. Kitaoka
    • 1
  • S. Yoshimoto
    • 1
  • T. Tono
    • 1
  • T. Ohba
    • 2
  1. 1.Department of Physics, School of ScienceUniversity of TokyoTokyoJapan
  2. 2.School of EngineeringUniversity of TokyoTokyoJapan

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