Plasmonics pp 269-316 | Cite as

Nanofabrication for Plasmonics

  • Gilles Lérondel
  • Sergei Kostcheev
  • Jérôme Plain
Chapter
Part of the Springer Series in Optical Sciences book series (SSOS, volume 167)

Abstract

Within the last 15 years, the scientific interest for individual or assembly of metallic nanostructures of well-defined size, geometry, and distribution has constantly increased. This paper aims at giving a comprehensive overview of the different nanofabrication techniques used in plasmonics including focused electron- and ion-beam lithography as well as the major associated challenges and issues. Alternative techniques, such as interference lithography and self-assembly techniques, are also discussed apart from material-related issues. The paper is divided into four parts emphasizing on metallic structures fabrication on planar surface, metallic structures fabrication on nonplanar surfaces, metallic structure surface functionalization and hybrid nanostructures fabrication. Finally, alternative techniques and forthcoming issues, such as material quality, nanostructuring on large scale, and plasmonic integration, are also addressed.

Keywords

Metallic Structure Plasmonic Structure Interference Lithography Nanosphere Lithography Thiol Molecule 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • Gilles Lérondel
    • 1
  • Sergei Kostcheev
    • 1
  • Jérôme Plain
    • 1
  1. 1.LNIO and CNRS UMR6279-STMRUniversité de technologie de TroyesTroyesFrance

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